| 摘要 |
PROBLEM TO BE SOLVED: To efficiently reduce oxidizing species which are mixed in into a reaction chamber. SOLUTION: A device has a reaction chamber 301, which can treat a substrate 305 to be treated in a heated condition and a carrier chamber 304 for holding the substrate 305 to be carried into the reaction chamber 301. The carrier chamber 304 has a cooling mechanism 310 which adsorbs substances contained in the atmosphere as solids.
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