MULTIPLE WAVELENGTH FILTER ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a small-sized multiple wavelength filter array which is excellent in a wavelength resolving power with respect to an incident light having plural wavelengths by respectively setting distances separating first and second distributed Bragg reflectors freely variably and contrallably or setting to values different from each other. SOLUTION: A lower-part distributed Bragg reflector (lower-part DBR) 11 as a first distributed Bragg reflector and upper-part distributed Bragg reflector (upper-part DBRs) 12 as second distributed Bragg reflectors separated with air gaps 13 above the first one are integrally formed on an Si substrate 1. A Fabry-Perot interferometer 10 is formed by the lower-part DBR 11 and upper- part DBR 12. The plural pieces of this Fabry-Perot interferometer 10 are arranged linearly on the same Si substrate. Then, a driving means for dividing which respectively variably controls distances separating the lower-part DBR 11 and respective upper-part DBRs 12 independently is provided as an electrostatic actuator having a fixed-side driving electrode 14 and movable-side driving electrodes 15. Thus, wave-lengths of transmission lights of respective Fabry-Perot interferometers 10 can be independently and arbitrarily selected.