发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a method for manufacturing it, wherein a layout area on a semiconductor chip is so saved as to be made adaptive to such reciprocal tendencies as reduction in size and increase in component density. SOLUTION: A storage node 14 is provided in a trench 18. A word line 30 is provided inside a substrate, while adjoining a part of the substrate. With a transistor provided vertically, the word line 30 acts as a gate while the storage node 14 and a bit line act as either a source or a train, and when activated by the word line 30, the transistor becomes conductive between the storage node 14 and the bit line.
申请公布号 JP2000031422(A) 申请公布日期 2000.01.28
申请号 JP19990165690 申请日期 1999.06.11
申请人 SIEMENS AG 发明人 RUPP THOMAS S
分类号 H01L21/82;H01L21/8242;H01L27/108 主分类号 H01L21/82
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