METHOD FOR IMPROVING ELECTRICAL CONDUCTIVITY BETWEEN ELECTRODE AND PLUG WITHIN LAMINATED CAPACITOR AND THE LAMINATED CAPACITOR

摘要

PROBLEM TO BE SOLVED: To provide a method for improving electrical conductivity between an electrode and a plug, in a laminated capacitor. SOLUTION: This electrical conductivity of a laminated capacitor is improved by improving the electrical conductivity between an electrode and a plug in the capacitor by bombarding an oxide by using ions and mixing the oxide with the materials of the electrode and the plug. The capacitor contains a barrier layer deposited in the electrode for preventing diffusion of a material which is used for reducing the electrical conductivity of the plug, formed for making electrical access to the electrode and a storage node and the electrical conductivity between the electrode and the plug.