| 摘要 |
PROBLEM TO BE SOLVED: To precisely align illumination light with a confocal pinhole by simple constitution without requiring troublesome work when a beam splitter is switched. SOLUTION: The illumination light L is reflected on a dichroic mirror 23 for excitation so as to irradiate a sample by an objective lens. Then, the light reflected from the sample is transmitted through the mirror 23 again and guided to a photodetector 34 through the confocal pinhole 33. In this case, an alignment optical system 38 making the angle of the light L identical to that of the light emitted by reflecting the light L is arranged. Then, when the light L is aligned with the pinhole 33, it is guided to the optical system 38 and the pinhole 33 is moved so that light quantity passed through the pinhole 33 becomes the largest.
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