| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray panel sensor which can obtain an image of good quality. SOLUTION: In an X-ray panel sensor, analog circuits 17a, 17b, 18a, 18b, 19 are arranged on the surface side of a signal processing board 13 and digital circuits 20, 21 are arranged on its rear surface side. Noises which are outputted via the analog circuits 17a, 17b, 18a, 18b, 19 and which are to be superposed on the output signal of a MOS image sensor 5; i.e., noises of X-rays which are incident on the analog circuits 17a, 17b, 18a, 18b, 19 from the upper side and noises which are propagated to the analog circuits 17a, 17b, 18a, 18b, 19 from the lower side and which come from the digital circuits 20, 21 and from the outside; are suppressed by an X-ray shielding plate 27 and a first metal thin film 13c. Since the analog circuits 17a, 17b, 18a, 18b, 19 and the digital circuits 20, 21 are mounted on the surface and the rear surface of the signal processing board 13, the size of the X-ray panel sensor as a whole can be miniaturized.
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