| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent operator's failure to remind the error generating condition by not only sounding a buzzer when an error is generated but also checking the error generating condition and sounding a buzzer again after the passage of the set time. SOLUTION: A snooze buzzer monitor and a controller 22 for controlling the sounding operation of a buzzer sounding section 23, an error condition saving area 25 for storing error condition, and a setting time saving area 24 for storing the time interval and the number of times of buzzers of the buzzer sounding section 23 are newly installed. The setting time saving area 24 is set in advance with the time interval and the number of times of buzzers. When an error occurs in a semiconductor manufacturing apparatus, an error monitor and controller 26 detects the error and causes the buzzer sounding section 23 to sound the buzzers. Then, the error condition is stored in the error condition saving area 25. With a buzzer stop button 27 depressed, the buzzer sounding section 23 stops the sounding buzzers. When the error is not settled, the snooze buzzer monitor and controller 22 drives the buzzer sounding section 23 at each interval of a specified time period, even after the buzzer sound stops to allow it sound the buzzers repeatedly for the set number of times.</p> |
