| 摘要 |
PROBLEM TO BE SOLVED: To detect air leakage more simply and accurately in a plasma producing device. SOLUTION: Discharge voltage, discharge current, and plasma emission intensity in a plasma producing device are correlated with the amount of air leakage under certain conditions. In other words, the amount of air leakage is in proportion to a discharge voltage value and emission intensity in the case of constant discharge current, and the amount of air leakage is in inverse proportion to a discharge current value and emission intensity in the case of constant discharge voltage. Furthermore, in the case of constant discharge electric power, the amount of air leakage is in inverse proportion to a discharge current value and emission intensity and is in proportion to a discharge voltage value. Therefore, it is possible to detect air leakage on the basis of changes in a voltage value or a current value measured at a measuring part 38 or changes in plasma emission intensity measured at an emission intensity measuring part 40 while controlling discharge voltage, current, or electric power at a control part 32 to perform D.C. discharge between a cathode tube 26 and an anode tube 28 for producing plasma. |
