SUBSTRATE TRANSFER EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a substrate transfer equipment where a driving source such as a motor is protected against troubles caused by a processing liquid atmosphere or a processing solution. SOLUTION: A roller support frame 71 is kept in a state to transfer a substrate along a horizontal plane with the rod 82A of a cylinder 82 extended. When the extended rod 82A is contracted by the cylinder 82, the roller support frame 71 is tilted by making the support pins 75 and 76 which are extended vertically along the transfer direction TD serve as a center. A drive shaft 77 through which a drive force is transmitted to a transfer roller 21 serves as a center of swing of a roller support frame 71, so that the engagement of a bevel gear 78 attached to the rotary shaft of a transfer roller 21 with a bevel gear 79 attached to a drive shaft 77 is restrained from being broken off even if the roller support frame 71 is tilted, and the transfer roller 21 can be rotated by the drive force of a motor 80. It is not necessary that the motor 80 is tilted together with the roller support frame 71.