METHOD AND APPARATUS FOR GROWING ORIENTED WHISKER ARRAYS

摘要

PURPOSE: The aim is to provide a method for controlled growing of whiskers on substrate that allows to prepare regular arrays of well-oriented whisker arrays in a large area. This method enables the preparation of regular arrays uniform of large areas. CONSTITUTION: A method for growing of oriented whisker arrays on a single-crystalline substrate consists in vapor-phase transport of the material to be crystallized from a solid-state source body of the same composition as the whiskers to the substrate coated with liquid-phase particles that serve as nucleation/catalyzing centers for the whisker growth. The source body has a plane surface that is faced to the substrate and parallel to it so that a vectorially-uniform temperature field, whose gradient is perpendicular to both the substrate and the source, is created. The vectorially-uniform temperature field is realized by an apparatus with high-frequency heating of specially designed bodies that are arranged in a special position in respect to the high-frequency generator.