| 摘要 |
PURPOSE: A thin film actuated mirrors array in an optical projection system is provided to preventing a point defect of pixel by preventing an effect in which an actuator are sticked on an active matrix. CONSTITUTION: The thin film actuated mirrors array comprising an active matrix (100) including a first metal layer (135), which a MOS transistor (120) is built-in and a drain pad of the transistor (120) extending from a drain of the transistor; a supporter (175) including i) a support line (174) formed onto the active matrix (100), ii) a support layer (170) formed integral with the support line and having a circular shape of rectangular, iii) a first anchor (171) and a second anchor (172a, 172b) supporting a support layer(170); an actuator (210) including a lower electrode (180), a first deformable layer (190), a second deformable layer (191), a first upper electrode (200), and a second electrode (201); a plurality of etching hole (290, 291) formed from one side of the first and the second upper electrode (200, 201) through the first and the second deformable layer (190, 191), the lower electrode (180), and the support layer(170); and a mirror formed onto the actuator (210).
|
