RETURNING DEVICE AND PRODUCTION DEVICE FOR SEMICONDUCTOR

摘要

PURPOSE: A returning device and a production device for a semiconductor are provided to promote the acceleration of a returning speed. CONSTITUTION: The returning device and a production device for a semiconductor comprise:a first delivery device to move toward a straight line; a second delivery device to move toward a right angle of the straight line; an arm(36) connected to be able to move toward a straight line to the second delivery device; a support device installed in the arm, and to support a chip; a delivery machine to connect the first delivery device and the arm.