| 摘要 |
PURPOSE: A thin film actuated mirrors array in an optical projection system is provided to increase a efficiency of light induced by increasing a degree of a surface of a mirror by a plasma ashing method. CONSTITUTION: The method for manufacturing a thin film actuated mirrors array comprising the step of: providing an active matrix (100) including a first metal layer (135), which a MOS transistor is built-in and a drain pad extending from a drain of the transistor; forming and patterning a first sacrificial layer (160) onto the active matrix; forming a first layer, a lower electrode layer, a second layer and an upper electrode layer onto the first sacrificial layer; forming an actuator (210) including a lower electrode, a first deformable layer, a second deformable layer, a first upper electrode and a second upper electrode onto the first layer by patterning the upper electrode, the second layer and a lower electrode; forming a supporter (175) including a support line, a support layer, a first anchor and a second anchor by patterning the first layer; forming a second sacrificial layer(300) by using accuflo onto the supporter and the actuator; and forming a mirror(260) onto the patterned second sacrificial layer.
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