ELIMINATING SYSTEM FOR DISCHARGING GAS CONTAINING TREE-CHLORINE FLUORIDE

摘要

PURPOSE: An eliminating system for a discharging gas containing a Three-Chlorine Fluoride(ClFx) is provided to eliminate a CIF compound from the gas containing the ClFx without generating a by-product. CONSTITUTION: An eliminating system comprises: a soda lime layer maintaining a temperature of less than 60°C; and a damp soda lime absorbent layer arranged close to a dry soda lime layer for cooling the dry soda lime layer and for eliminating poisonous compound such as HF, ClH4, and Cl2 from a gas going to be eliminated.