OBJECT FIXTURING INTERFEROMETER

摘要

PURPOSE: An object fixturing in interferometer is provided to improve accuracy of positioning establishment and to let the object situated in interferometer of the same measured position. CONSTITUTION: The object fixturing system applied to an interferometer which has a pair of diffraction gratings arranged to produce and recombine test and reference beams. The object positions between diffraction gratings so that a test beam is incident on a surface of the object at a grazing incidence angle. The object platform which is arranged movably between diffraction grainings has the window supporting object and transmitting a test beam. The fixture is then removed for a simultaneous measurement of an entire surface of the object, which can be clamped in place if necessary by a clamping window that also transmits the test and reference beams.