CYLINDRICAL STORAGE CAPACITOR OF A MEMORY CELL AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: A cylindrical storage capacitor of a memory cell is provided to prevent a micro bridge between adjacent storage capacitors. CONSTITUTION: The cylindrical storage capacitor comprises: an insulating layer(15) formed on an upper plane of a semiconductor substrate; a conductive plug in a contact hole(32) vertically passing through a predetermined region of the insulating layer so as to be connected electrically to a diffusion region; a poly-crystal silicon layer(21) for a storage electrode formed in a cylindrical structure on the insulating layer so as to be connected electrically to the conductive plug(19), wherein a hemi-spherical grain silicon(23) is formed on inside and upper planes of the cylindrical structure; a dielectric layer(25) deposited on inside, upper and outside planes of the poly-crystal silicon layer(21); and a pattern of a poly-crystal silicon layer(27) for a plate electrode formed on the dielectric layer.