OVERLAY ERROR MEASURING MARK

摘要

PURPOSE: An overlay error measuring mark is provided to improve the reliability of an overlay error measuring value. CONSTITUTION: The overlay error measuring mark for measuring an overlay accuracy of a semiconductor device comprises: an overlay outside box mark(25) of the positive pole; and an overlay inside box mark(26) of the positive pole formed in a size smaller than the size of the overlay outside box mark of the positive pole on the overlay outside box mark of the positive pole. Also, the overlay error measuring mark for measuring an overlay accuracy of a semiconductor device comprises: an overlay outside box mark(25) of the negative pole; and an overlay inside box mark(26) of the negative pole formed in a size bigger than the size of the overlay outside box mark of the negative pole on the overlay outside box mark of the negative pole. Also, the overlay error measuring mark for measuring an overlay accuracy of a semiconductor device comprises: an overlay outside box mark(25) of the positive pole; and an overlay inside box mark(26) of the positive pole formed to be partially overlaid the overlay outside box mark of the positive pole on the overlay outside box mark of the positive pole.