PREPARATION METHOD OF INFRARED RAY ABSORBING BOLOMETER

摘要

PURPOSE: A preparation method of infrared ray absorbing bolometer is provided to enhance the infrared ray absorbency of the bolometer by forming a flat absorbing band as time goes. CONSTITUTION: The preparation method of infrared ray absorbing bolometer comprises: a step forming a pair of supporting levels comprising a substrate, a driving substrate level having a pair of connecting terminals, and a pair of supporting legs having a connecting line; a step forming an absorbing level comprising an absorbing band consisted of SiO2 on the supporting levels, and a bolometer element within the absorbing band; and a heat treatment step treating the SiO2 absorbing band under 200-400°C.