| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid crystal display element free from the degradation in the adhesion property of films and film peeling which occur in the case lead parts laminated with picture element wiring electrodes by ITO films are drawn out between both gate and source electrodes consisting of the tantalum films of power source lead parts of gate COG(clip-on-glass). SOLUTION: Gate wiring 2 is formed by patterning the tantalum film deposited on a glass substrate 1 and thereafter, a TaOx film is formed in the surface layer part by anodic oxidation and SiNx is formed as a gate insulating film 4. The insulating film is removed only from the input and output parts of the power source lead parts of the gate COG and the insulating film is made to remain in other parts. The transparent electrode material ITO and tantalum constituting the picture element electrodes 8 are deposited and are then patterned to form the source and drain electrode wiring 10. The overlap width of the gate tantalum film, picture element ITO film and source tantalum film constituting a contact is confined to <=100μm. The good adhesion property of the lead parts is obtd. by the insulating films made to remain. A protective film is formed on the upper layer, by which a TFT-LCD matrix substrate is constituted.</p> |
