| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to easily carry out height regulation by constituting the device of a rotational driving means for rotationally driving rubbing rolls, a stage to be loaded with works constituted movably back and forth in a horizontal direction, a base installed with the rubbing rolls, the rotational driving means and the stage, etc. SOLUTION: The rubbing device 21 comprises the three rubbing rolls 22a to 22c, roll stands 23a to 24c housing these rolls and motors 24a to 24c for rotating the rubbing rolls 22a to 22c. Further, the device is provided with the stage 26 to be loaded with the works, a stage lifting mechanism for lifting the signal 26, surface plates 25a, 25b and the base 28 made of graphite to be loaded with a stage regulating mechanism. When a motor 34 rotates a ball screw 33, the stage lifting device is moved in the horizontal direction and the members is moved laterally, by which the stage lifting device is raised and lowered. The base 28 of the rubbing device is made of stone, by which the flatness of the base may be improved in a such constitution. |
