METHOD FOR MANAGING FACILITY UNIT STATE OF SEMICONDUCTOR MANUFACTURING FACILITY MANAGEMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a method for managing facility unit state of a semiconductor manufacturing facility management system for improving the whole producing efficiency of a product by capturing a unit the abnormality of which is generated in real time and quickly causing this unit to be separated from a normal process. SOLUTION: This method comprises a step S10 for receiving the movable state data of each unit from a facility, a step S20 for retrieving reference data pertinent to the unit, a step S30 for comparing the movable state data with the reference data, and deciding whether or not a unit whose movable state data are separated from the reference data is present among the units, and returning to the S10 when unit whose movable state data are separated from the reference data is not present, a step S40 for updating the variable ID key value of the unit when the unit whose movable state data are separated from the reference data is present, and a step S50 for preserving the variable ID in a prescribed unit control message, and down-loading the unit control message to the facility and changing the movable state of the unit.