| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the floor area of an apparatus for producing color filter panels and to enable the effective utilization of a factory space by arranging plural resist coating application mechanisms for applying color resists of various colors in parallel with an exposure means. SOLUTION: The plural resist coating application function sections 4 corresponding to the various color resists are arranged in parallel with the exposure function section 6. The glass substrates introduced via a substrate feeding and housing function section 1 from outside are transported to a washing function section 2 where the substrates are subjected to a washing treatment. The substrates are then transferred to a next substrate drying function section 3. The glass substrates are then transferred to the resist coating application function sections 4 where the substrates are coated with the color resist of any among black, red, green and blue and are subjected to a calcination treatment in an ensuing prebaking function section 5. The common use of the exposure function section 6 with the resists of the plural colors is made possible by using such constitution and, therefore, the floor area of the apparatus may be reduced.</p> |
