发明名称 Micro vibrating mirror for displays, scanners and optical monitoring systems
摘要 The mirror has a free-mounted mirror surface (11) connected to a carrier body (13), via a torsion axis (19) formed by at least one torsion beam (12,12') attached to the mirror surface. A flexural beam (14,14'), between at least one torsion beam and the carrier body, performs flexural oscillations that induce a torsional oscillation of the mirror surface about the torsional axis.
申请公布号 DE19857946(C1) 申请公布日期 2000.01.20
申请号 DE19981057946 申请日期 1998.12.16
申请人 ROBERT BOSCH GMBH 发明人 HERRMANN, FALK
分类号 B06B1/02;B06B1/06;B81B3/00;G02B26/08;(IPC1-7):G02B26/00 主分类号 B06B1/02
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