| 摘要 |
PROBLEM TO BE SOLVED: To provide the method and device for recycling a waste liq. etchant by which the raw material cost is reduced, and the pollution problem against the environmental conservation is reduced by completely recovering a waste copper chloride liq. etchant, regenerating it by reaction and resupplying the regenerated liq. for use in plating. SOLUTION: A waste liq. etchant is recycled by the following method. Namely, the waste copper chloride soln. generated in an etching tank 1 is recovered, subjected to the synthetic step, heat-decomposition step, dehydration step and dissociation step and then sent to an electroplating step for electroplating. As a result, the waste copper chloride soln. generated in the etching tank 1 is recycled, the pollution problem against the environmental conservation is prevented, and the raw material cost is reduced. Besides the device used in this method is composed of a recovery unit for recovering the waste copper chloride soln., a unit for supplying the raw reactant, a reaction unit 5, a unit 6 for dehydrating the reaction product, a unit 7 for dissociating the dehydrated reaction product to produce an electrolyte and an electroplating unit 8 utilizing the obtained electrolyte.
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