| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent thin film excellent in durability such as wear resistance, heat resistance, impact resistance and corrosion resistance, insulation performance and transparency. SOLUTION: The transparent thin film having high durability is a thin film comprising either an inorganic nitride or an inorganic nitro-oxide, which is formed on a substrate by the hollow-cathode type ion-plating process. The inorganic elements being nitrided and constituting the inorganic nitride or nitro- oxide are one or more element selected from the group consisting of Si, P, Ge, Ga, B and C.
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