| 摘要 |
PROBLEM TO BE SOLVED: To improve the transparency, barrier properties and durability of a transparent barrier film by a method wherein a barrier layer provided on at least one side of a base material film is either a thin inorganic nitride film or a thin inorganic nitride oxide formed by a hollow cathode type ion plating. SOLUTION: A transparent barrier film 1 consists of a base material film 2 and a barrier layer 3 formed on one side of this base material film 2. The barrier layer 3 may well be equipped on both the sides of the base material film 2. As the base material film 2, a polypropylene-based polymer, a polyethylene terephthalate, a polyethylene naphthalate, a nylon or the like is especially preferable. As the barrier layer 3, a thin film made of an inorganic nitride or an inorganic nitride oxide formed by a hollow cathode type ion plating or a nitride of Si, C or the like (or the nitride of a carbon silcide or the like), can form a thin transparent film and is preferable and SiNx (in which, the x is 1-2) as the nitride of Si is especially preferable.
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