| 发明名称 |
Thin film magnet, cylindrical ferromagnetic thin film and production method thereof |
| 摘要 |
A thin film magnet and a cylindrical ferromagnetic thin film having a high maximum energy product (greater than 120 kJ/m3) and thus suitable for use in miniature high performance devices are provided. The thin film magnet is produced by means of physical vapor deposition. The thin film magnet is an (Nd1-xRx)yM1-y-zBz alloy having a ferromagnetic compound of the Nd2Fe14B type as its main phase, wherein R is Tb, Ho, and Dy and M is Fe metal or an Fe-based alloy including at least one of Co and Ni, 0.04</=x</=0.10,0.11</=y</=0.15, and 0.08</=z</=0.15. A perpendicular magnetization film having such a composition is deposited on the side wall of a substrate in the columnar (or cylindrical) form thereby obtaining a cylindrical ferromagnetic thin film having radial anisotropy.
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| 申请公布号 |
USRE36517(E) |
申请公布日期 |
2000.01.18 |
| 申请号 |
US19980172876 |
申请日期 |
1998.10.15 |
| 申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
ARAKI, TAKESHI;TANI, YOSHIHIRO;IKEDA, HIDEO;OKABE, MASASHI |
| 分类号 |
H01F10/14;B81B1/00;B81C1/00;C23C14/06;C23C14/28;C23C14/34;H01F1/057;H01F10/12;H01F41/02;H01F41/18;H01F41/20;(IPC1-7):B05D5/12 |
主分类号 |
H01F10/14 |
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