摘要 |
A method is disclosed for mechanically and electrically bonding metallic materials and semiconductor materials. The method according to the invention may be used, for example, in forming a semiconductor electrical heater, particularly for use in electrical smoking articles. A metallic element 2, such as a copper alloy power supply tab, is laser welded to a semiconductor element 1, such as a doped silicon resistive heater element. A laser beam L is directed through a hole 3 in the copper alloy tab to melt some silicon material 5, which flows into the hole in the copper tab, reacts and intermixes with the copper and solidifies to form a slug containing copper silicide. A protective material such as nickel may be applied to protect the copper silicide from oxidation if desired. An ohmic, low resistance contact and high strength bond is provided between the parts. <IMAGE> |