发明名称 |
FILM TRANSFER TENSION CONTROLLER OF EXPOSURE LIGHT DEVICE FOR FLEXIBLE BALL GRID ARRAY SEMICONDUCTOR PACKAGE |
摘要 |
PURPOSE: A film tension controller capable of easily controlling a tension of a film which is supplied and discharged to and from an exposure light section of an exposure light device is provided. CONSTITUTION: The film transfer tension controller of an exposure light device for a flexible ball grid array semiconductor package comprising: a nozzle(10) mounted between a supply roller(21) and a supply servo roller(25) and between a discharge servo roller(26) and a winding roller(22) for injecting a fluid of a predetermined pressure on an upper surface of a transferring film(17); a sensor(11) for sensing a location of a film(17) drooped in a lower direction by means of a pressure of the fluid discharged by the nozzle(10); a fluid pressure controller for receiving a film location signal sensed by the sensor(11) and controlling an injecting pressure of the nozzle(10); a supply servo roller(25) and a discharge servo roller(26) for transferring a supplied or discharged film to act a fluid pressure of the nozzle(10) when the exposure light device descends on a film of an exposure light section(30); and idle rollers(23, 24) installed at a lower side of a guide surface of the exposure light section(30) for generating a previous tension in the film(17) of the exposure light section(30).
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申请公布号 |
KR20000000133(A) |
申请公布日期 |
2000.01.15 |
申请号 |
KR19990040558 |
申请日期 |
1999.09.21 |
申请人 |
ACQUTEK SEMICONDUCTOR & TECHNOLOGY CO., LTD. |
发明人 |
CHO, IM SEOK |
分类号 |
H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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