MODULE FILTER FOR USING A SEMICONDUCTOR CLEAN ROOM

摘要

PURPOSE: A module filter used as a semiconductor clean room is provided to remove dust and particles without pressure losses by using the module filter having functions of a high cleaning filter and a chemical filter. CONSTITUTION: The module filter comprises a plurality of separator(12) formed in a frame(11) and spaced apart from each other; a filter medium(13) attached in the separator(12) in turn; and a chemical filter(21) is formed between the filter mediums. The chemical filter(21) is removed the ionic particles from an air by absorbing and coupling counter ions included in the air.