METHOD OF FORMING A THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: Method of forming TFT(Thin Film Transistor) LCD(Liquid Crystal Display) is provided to easily form fine ITO(Indium Tin Oxide) pattern by improving interface characteristics between inorganic ITO and organic protection layer. CONSTITUTION: The method includes the step of providing an insulating substrate having a thin film transistor on upper surface thereof, forming an organic insulating protection layer, performing a cleaning process on an upper surface of the protection layer by using UV, after the cleaning process, performing a plasma process on the upper surface of the protection by using F based gas, after performing the plasma process, forming an ITO(Indium Tin Oxide) layer on the upper surface of the protection layer, and patterning the ITO layer to form a pixel electrode.