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发明名称
REDUCTION LENS OF STEPPER
摘要
申请公布号
KR100237742(B1)
申请公布日期
2000.01.15
申请号
KR19960026515
申请日期
1996.06.29
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
JO, CHAN SEOP;GIL, MYOUNG KUN;HAN, MIN SEOP
分类号
G02B9/00;H01L21/027;(IPC1-7):H01L21/027
主分类号
G02B9/00
代理机构
代理人
主权项
地址
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