QUARTZ BOAT FOR TRANSFERRING SEMICONDUCTOR WAFER,申请号KR19950042514-传众专利搜索

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发明名称	QUARTZ BOAT FOR TRANSFERRING SEMICONDUCTOR WAFER
摘要
申请公布号	KR100240020(B1)	申请公布日期	2000.01.15
申请号	KR19950042514	申请日期	1995.11.21
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	CHO, HO-JIN
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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