| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the spatial resolution of a tomographic image without narrowing the interval among a plurality of X-ray detectors. SOLUTION: A specimen 14 is arranged between an X-ray source 1 and a number of X-ray detectors 8. For reconfiguring a sectional image in one cross section of the specimen 14 on a rotary table 3, X rays from the X-ray source 1 are applied to the specimen 14 while rotating the rotary table 3. X rays through the specimen 14 are detected by a number of X-ray detectors 8. A detection signal from the X-ray detector 8 are inputted to a computer 19. The position of the rotary center of the rotary table 3 is shifted after the rotary table 3 rotates by one turn, X rays are applied to the same cross section as the specimen 14, and the rotary table 3 is rotated again. Then, X rays through the specimen 14 are detected by a number of X-ray detectors 8. The computer 19 reconfigures a tomographic image for one cross section using a signal that is detected by a number of X-ray detectors 8 while the rotary table 3 rotates by two turns.</p> |
