| 摘要 |
PROBLEM TO BE SOLVED: To reduce the input capacity of a probe by suppressing the effects of a stary-capacity caused by a probe-tip electrode and a probe and to install a probe to a crystal with electro-optical effects detachably. SOLUTION: A probe electrode 3 with a capacity coupling part 7 is installed to one end of the electro-optical element 2 of the voltage waveform measuring probe 1 to measure voltage waveforms by detecting a change in the state of polarization of light transmitted through the etectro-optical element 2 with etectro-optical effects. A probe-tip electrode 5 constituting a probe electrode 3 or a needle-shaped electrode 6 is detachably installed to a probe connecting electrode 4 provided on the side of the electro-optical element 2.
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