| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing uniform very large integrated semiconductor optical waveguide array having high-performance characteristics by which the element yield from one wafer can be drastically increased. SOLUTION: A manufacturing method by which a semiconductor optical waveguide array provided with a plurality of optical waveguides, obtained by selectively growing a multilayered semiconductor structure having a quantum well layer or another multilayered semiconductor structure composed of bulk layers into crystals in stripe-like growing regions 1 can be manufactured. In this method, each of the stripe-like growing regions 1 extended in parallel is formed between dielectric thin films and, when the multilayered semiconductor structure is selectively grown into the crystals by the metal organic vapor growth method in each growing region 1, each region 1 is formed in parallel with another at an interval which is shorter that the diffusing length of the raw material species in a reaction tube, when the crystals are grown. In addition, the widths Wm1 and Wm2 of the first and second outermost dielectric thin films respectively arranged on the outsides of the two outermost growing regions 1 are made narrower than a width Wa (Wm1>Wa and Wm2>Wa) of each dielectric thin film which is formed between growing regions 1. |
