发明名称 CRYSTAL ORIENTATION-MEASURING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To quickly and accurately obtain a crystal surface orientation by unnecessitating the measurement of the reference position of a rotary angle. SOLUTION: A device is provided with a data-processing part for calculating the orientation of a specific crystal surface in a peripheral direction for a mark 17 of a specimen 1 byδ-reading valuesδ0+ andδ180+ for giving the peak output of an X-ray detector 5 when the specimen 1 that is a nearly circular plate- shaped crystal is rotated byδturn each at a normal position and a position where the front and revere sides are reversed.</p>
申请公布号 JP2000009663(A) 申请公布日期 2000.01.14
申请号 JP19980173545 申请日期 1998.06.19
申请人 TOSHIBA FA SYST ENG CORP 发明人 UYAMA KIICHIRO;ARAI KENJI;MATSUSHITA HIROSHI;MIZUGUCHI HIROSHI;SHINOHARA MASAHARU;SONODA MASAAKI;TOMIZAWA MASAMI
分类号 G01N23/20;H01L21/66;(IPC1-7):G01N23/20 主分类号 G01N23/20
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