发明名称 |
CRYSTAL ORIENTATION-MEASURING DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To quickly and accurately obtain a crystal surface orientation by unnecessitating the measurement of the reference position of a rotary angle. SOLUTION: A device is provided with a data-processing part for calculating the orientation of a specific crystal surface in a peripheral direction for a mark 17 of a specimen 1 byδ-reading valuesδ0+ andδ180+ for giving the peak output of an X-ray detector 5 when the specimen 1 that is a nearly circular plate- shaped crystal is rotated byδturn each at a normal position and a position where the front and revere sides are reversed.</p> |
申请公布号 |
JP2000009663(A) |
申请公布日期 |
2000.01.14 |
申请号 |
JP19980173545 |
申请日期 |
1998.06.19 |
申请人 |
TOSHIBA FA SYST ENG CORP |
发明人 |
UYAMA KIICHIRO;ARAI KENJI;MATSUSHITA HIROSHI;MIZUGUCHI HIROSHI;SHINOHARA MASAHARU;SONODA MASAAKI;TOMIZAWA MASAMI |
分类号 |
G01N23/20;H01L21/66;(IPC1-7):G01N23/20 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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