发明名称 MANUFACTURE OF TAB TAPE CARRIER
摘要 PROBLEM TO BE SOLVED: To eliminate tarnish on a metal foil surface by introducing a cathode- electrolysis treatment in a photoresist removing process, for the leads formed on the insulating film. SOLUTION: Adhesive material is applied on a single surface of a polyimide film 1, on which punching work is made to prepare device holes 5, outer holes 6 and sprocket holes 7, and copper foil is pasted. Then, leads 4 of specified patterns are formed by etching the copper foil using photoresist layer as masking material. After immersing in a first bath that contains sodium hydroxide solution, cathode-electrolysis treatment is applied in a second bath that contains electrolytic solution of sodium hydroxide containing nonionic surface-active agent. Consecutively, the photoresist layer and a backside protecting resist layer are removed by immersing in a third bath that contains hydrosulfric acid cleaning solution.
申请公布号 JP2000012624(A) 申请公布日期 2000.01.14
申请号 JP19980175143 申请日期 1998.06.22
申请人 HITACHI CABLE LTD 发明人 MATSUMOTO YUKO
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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