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发明名称
摘要
申请公布号
FR2057004(A1)
申请公布日期
1971.05.07
申请号
FR19700026583
申请日期
1970.07.07
申请人
IBM
发明人
分类号
H01L29/73;H01L21/00;H01L21/331;H01L21/74;H01L21/762;H01L23/29;H01L27/00;(IPC1-7):01L7/00;01L11/00
主分类号
H01L29/73
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代理人
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