| 摘要 |
PCT No. PCT/IL96/00190 Sec. 371 Date Aug. 24, 1998 Sec. 102(e) Date Aug. 24, 1998 PCT Filed Dec. 24, 1996 PCT Pub. No. WO97/24915 PCT Pub. Date Jul. 17, 1997A microelectronics deformation sensor including at least one stress sensor directly integrated on at least one of an extremity of a supported deformable structure and a support of the deformable structure, the deformable structure being constructed of a single crystal material, the at least one stress sensor sensing a stress in a vicinity of the extremity and thereby sensing a deformation of the deformable structure. |
