| 摘要 |
PROBLEM TO BE SOLVED: To provide a method in which air hardly intrudes into a plasma chamber during atmospheric plasma arc and an apparatus therefor. SOLUTION: This surface modifying apparatus has a plasma chamber 11 comprising a closed housing 11a, a discharge port 18a for a feedstock gas 25 at a neighbor of an inlet port 19a for a film sheet of the housing 11a, and on the other hand a charging port 18b for the feedstock gas 25 at a neighbor of an outlet port 19b for the film sheet 21 of the housing 11a. In this surface modifying apparatus, the raw material gas 25 is made to flow in the opposite direction to the transferring direction of the film sheet 21. That is, when the feedstock gas 25 is introduced from the raw material gas-charging port 18b and discharged from the feedstock gas-discharging port 18a, a part of the gas is discharged also from the film sheet inlet port 19a, and thereby outside air hardly intrudes into the plasma chamber 11 from the film sheet inlet port 19a.
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