| 摘要 |
PROBLEM TO BE SOLVED: To easily cope with various very small bodies of different size with simple structure, effectively, and by replacement of limited parts only. SOLUTION: This device is provided with a feeder 1 for conveying workpieces 2 while lined up, and a guide part 3a and an inspection part 3b arranged opposite and close to the discharge part of the feeder 1 and in order from the upstream side thereof, and in its downstream part, it has a vacuum conveying part 3 provided with a branch mechanism 3c to a nondefective storing part 6 and a defective storing part 7, a CCD camera 8 for performing image pickup of the workpieces 2 being conveyed in an inspection part 3b in the vacuum conveying part 3, and an image inspection device 19 for treating the image taken by the CCD camera 8. In this way, the device is miniaturized and is made to have simple structure. When changing the size of the workpiece, it is sufficient to replace the discharge part of the feeder and the guide part of the vacuum conveying part only. Speedup of the treatment can be attained.
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