INSPECTION METHOD FOR SURFACE DEFECT AND INSPECTION DEVICE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device of a shadow mask with high detection sensitivity and easy workability. SOLUTION: This method is an inspection method inspecting a shape-defect of a pattern consisting of a hole part connected to a surface part of a sample 110 that has a periodic pattern placed by periodically repeating a pattern consisting of a hole part with a rough surface part that is connected to a surface of a base material and caved into an inside thereof, and image-processes image data of a shooting image after reflected-lighting a bright field by a diffusion light controlled within predetermined extended angle with relatively moving the sample to a shooting system and shooting a surface of the sample 110 by a imaging means 130 for a line-shape region to get the shooting image, and determines a fillet diameter and/or a projected area of each pattern of the sample 110 to judges with a part of which each value is not within a predetermined range as a defect part.