| 摘要 |
PROBLEM TO BE SOLVED: To compactly constitute a component and improve the operation responsiveness by integrally assembling a pad for attracting and holding an IC to be tested, an actuator for moving the pad, and a suction control valve for turning on and off the attaching force of the pad. SOLUTION: An air cylinder 1052 vertically moves a pad 1051 for suctionally holding an IC to be tested, and the drive of the air cylinder 1052 is controlled by a cylinder control valve 1053. A vacuum generator 1054 imparts an attracting force to a pad 1051, and ON/OFF of the vacuum generator 1054 is controlled by a feed valve 1055 and a breaking valve 1056. A pressure sensor 1057 detects the attracting force by the vacuum generator 1054. The air cylinder 1052, the vacuum generator 1054, the pressure sensor 1057, and the like are integrally assembled in a block. An air hose 1058 for supplying the compressed air in a factory is connected to the upper part of the vacuum generator 1054, and the compressed air introduced therefrom generates a suction in a hose connected to the pad 1051 to suck the IC to be tested.
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