| 摘要 |
PROBLEM TO BE SOLVED: To provide a parallel flat board type vibration gyro and a parallel flat board type vibration gyro device in which a twist is strong, and a miniaturization is facilitated, and it is easy to complete characteristics of a vibration part and a detection part, and manufacturing costs can be decreased. SOLUTION: A base material 4 made of stainless of a vibration gyro 1 is a square pillar and pairs of through holes 10, 7 perpendicular to each other are opened at both upper and lower parts of the base material 4, respectively, and a pair of parallel flat board parts 3A, 3B, 2A, 2B is structured. A titanium film 13 is formed on an outside surface of the parallel flat board parts 2A, 2B as a drive part and the parallel flat board parts 3A, 3B as a detection part, and a PZT thin film 14 is formed on the entire outer surface of the titanium film 13, and a first electrode film 15 to a fourth electrode film 18 are formed on the PZT thin film 14, respectively. The vibration gyro 1 is supported by a fixed axis 20 coupled and fixed on a side surface between the parallel flat board parts 2A, 2B of both the drive parts. |
