| 摘要 |
<p>PROBLEM TO BE SOLVED: To display the thickness of a thin film formed on a sample as a map image in a face analysis. SOLUTION: A control means 4 performing a face analysis operation fetches a signal from a signal processing section 3 and stores an X-ray intensity data at each pixel position of a basic material 10 and a thin film 11 in an X-ray intensity data storing section 8. According to a designated method, a thickness map image forming section 7 operates the thickness of the thin film 11 based on the X-ray intensity at some pixel position of the basic material 10 and the X-ray intensity at the same pixel position of the thin film 11 and then writes the results in the relevant pixel position of an image memory for all pixel positions. Film thickness thus determined is sorted into several stages which are displayed with different colors. Color bars indicating correspondence between the color and the film thickness of a film thickness map image are also displayed.</p> |
