发明名称 CONTAMINATION PREVENTING CUSTODY AND TRANSPORTATION CONTAINER
摘要 <p>PROBLEM TO BE SOLVED: To prevent organic matter contamination from in an environmental air, etc., by a method wherein, by use of a meal material of a specified hardness between structural parts as a pressing sealing material, metallized bellows or check valves for holding a difference between an air pressure of the open air and a container inner phase part at a minimum are equipped. SOLUTION: A main body part is a box-like easing made of aluminum and a sample inputting/outputting opening and closing door 2 made of aluminum. A metallized retaining tool 4 of a wafer 3 installed lengthwise internally is made of a stainless steel, and there is a corresponding trench in each wafer in order to prevent the wafers 3 from coming into contact with each other. In order to make airtight between the opening and closing type door 2 and the main body 1, a gasket made of aluminum with high purity and at Brinell hardness 20 or less is used as a packing 5, and the door 2 and the main body 1 are clamped and fixed to each other by a buckle, and the interior is conductive by bellows made of a brass at one position of the main body part. Thus, it is possible to prevent organic matter contamination by a container itself and the open air during custody or transport of a material.</p>
申请公布号 JP2000003954(A) 申请公布日期 2000.01.07
申请号 JP19980204191 申请日期 1998.06.15
申请人 SUMIKA CHEMICAL ANALYSIS SERVICE LTD 发明人 TAKEDA KIKUO;NONAKA TATSUO;MOCHIZUKI AI;OTSUKA YOSHIYASU;INOUE YOSHIO;ABE KATSUMASA
分类号 H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/673
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