| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for producing an electrode substrate capable of preventing the sticking of mist such as grease scattering at the inside of a vacuum chamber and to provide a method for producing it. SOLUTION: This device for producing an electrode substrate is the one in which a casset 4 stored with substrates is disposed at the inside of a chamber, the casset 4 is connected with a shaft 7 projected to the outside of the chamber 1, the shaft 7 is freely movable up and down and is airtightly supported by a vacuum seal 6 disposed on the chamber 1, and a water cooled board 2 for cooling the wall of the chamber 1 is fixed.
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