VERFAHREN UND VORRICHTUNG ZUM ABSCHIRMEN DES SUSCEPTORS WÄHREND DES EPITAKTISCHEN WACHSENS BEI CVD

摘要

A method for protecting a susceptor when SiC, a Group III-nitride or alloys thereof, is epitaxially grown by chemical vapor deposition on a substrate arranged on a surface of the susceptor includes the steps of heating the susceptor and thus the substrate and a gas mixture fed to the substrate for the growth, placing a plate made of SiC, an alloy of SiC and the material grown, or the material grown, on the susceptor and arranging the substrate on the plate.