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发明名称
VORRICHTUNG ZUM ABSCHEIDEN VON SCHICHTEN AUS HALBLEITER MATERIAL
摘要
申请公布号
DE1444422(B2)
申请公布日期
1971.09.30
申请号
DE19621444422
申请日期
1962.11.15
申请人
发明人
分类号
C30B25/02;H01L21/00;(IPC1-7):B01J17/32
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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